Flow ranges 0...30 to 0...±1000 sccm
(sccm = standard cubic centimeters per minute)
Flow ranges 0...±25 sccm, 0...±1000 sccm 0...1000 sccm, 0...6 slpm
sccm = standard cubic centimeters per minute
slpm…
Flow range 0...200 slpm
(slpm = standard litre per minute)
Output signal 1...5 V
Flow range 0...200 slpm
(slpm = standard litre per minute)
Ranges 0...1000 sccm1 and 0...6 slpm2
· Actual mass flow sensing
Pressure ranges 0...±2 inch H2O
(0...±5 mbar)
Flow ranges 0...±200 sccm
(sccm = standard cubic centimeters per minute)
Flow ranges 0...±30 to 0...±1000 sccm
(sccm = standard cubic centimeters per minute)
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