P-853/P-854 PiezoMikes are micrometer drives with integrated high-resolution piezo linear drives. They can be operated manually, like standard micrometer drives. Sensitivity of the micrometer is 1 µm. By controlling the piezo voltage, the micrometer tip is automatically moved in and out (up to 25 µm) relative to the manually set position. Resolution of the piezoelectric motion is in the sub-nanometer range. The PiezoMike can therefore be used as a remotely controlled fine positioning element.